The WRA-2138 Float Lenspanel is dedicated to the use with Digital Backs with sensor activated electronic shutter and has a Rodenstock 6. 5138 HR-Float Digaron lens with Aperture Only mounted in a helical focussing mount, which also drives a floating element for optimal sharpness at any focussed distance.

Wafer inspection system, 8

Wafer Chuck: 200mm Low Contact Type

Wafer Handling Autoloader

Single Pentium Processor

Array Mode Pixel: 0.25, 0.39, 0.62, 1.25

Random Mode Pixel: 0.25, 0.39, 0.62, (1.25 um TBD)

400 MPS Image Computer

Random Array Mode Inspection

2 Standard Cassette Plates

ADC Option

SAT Option (Segmented Auto Threshold)

Full Compatibility with KLA-Tencor Klarity Software via Directlink

SECS Compliant

XE (Xenon) Ultra Broadband Light Source

Blower Box included

CE Compliant Line Conditioner

Operations Manual Documentation

208V, 3PH, 5060Hz.